Article 1ZZ3F Leading Chipmakers Eye EUV Lithography to Save Moore’s Law

Leading Chipmakers Eye EUV Lithography to Save Moore’s Law

by
Rachel Courtland
from IEEE Spectrum on (#1ZZ3F)
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Intel, TSMC, and other chipmakers weigh extreme ultraviolet lithography, which may be ready by 2018ADoLlRiwlFg
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