Article 5E446 Multiphysics Modeling of MEMS

Multiphysics Modeling of MEMS

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from IEEE Spectrum on (#5E446)
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Microelectromechanical systems (MEMS) are fundamentally driven by multiphysics phenomena, and as such, they require a modeling approach where the relevant physical phenomena are included and coupled. Join James Ransley from Veryst Engineering for a demonstration of how to use multiphysics modeling for MEMS systems.

In the presentation, Ransley will discuss the tools required to model a wide range of sensors and transducers. Effects covered include electromechanical couplings, thin-film damping, thermoelastic damping, and anchor losses.

A live demo in the COMSOL Multiphysics(R) software will illustrate equation-based approaches to modeling a MEMS gyroscope. A Q&A session will conclude the webinar.

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James Ransley, Veryst Engineering

Dr. Ransley began working on piezoelectric devices in 2008, when he joined the development team at Xaar, which was responsible for the pioneering Xaar 1001 commercial inkjet printhead. In 2010, he left Xaar to work for COMSOL, expanding his knowledge of modeling piezoelectrics as the technical product manager of the MEMS Module. Now, he shares that experience with a range of clients across multiple industries as a consultant with Veryst Engineering.

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Yeswanth Rao, COMSOL

Yeswanth Rao is a senior applications engineer and has been with COMSOL since early 2008. He holds a PhD in biological engineering and a master's degree in electrical engineering. His finite element background is in MEMS, particularly piezoelectric modeling.

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