AMSL: 4.5 Million Cumulative EUV Wafers Processed Through 2018
by Arne Verheyde from Tomshardware on (#4WN3R)
In a EUV update at the IEDM 2019 conference, ASML has disclosed that the number of wafers run through an EUV tool reached 4.5 million at the beginning of 2019. The latest NXE:3400C achieved 170WPH.