TSMC reiterates it doesn't need High-NA EUV for 1.4nm-class process technology
by ashilov@gmail.com (Anton Shilov) from Latest from Tom's Hardware on (#6XKFE)
TSMC reaffirmed that it will not use High-NA EUV lithography for its upcoming A16 and A14 process technologies, as Low-NA EUV tools combined with internal innovations provide sufficient scaling and performance benefits.