Imec patterns first logic and DRAM transistors using High-NA litho tools from Tomshardware on 2024-08-07 15:41 (#6PT4N) ASML and Imec successfully demonstrate high-resolution patterning using High-NA EUV tools.
Samsung may start installing its first High-NA EUV litho tool in late 2024 from Tomshardware on 2024-08-15 15:40 (#6Q08C) Samsung will be about a year behind Intel in installing ASML's Twinscan EXE:5000 High-NA litho tool for development purposes.