ASML's roadmap for chipmaking lithography tools examined — from DUV to Low-NA, High-NA, Hyper-NA, and beyond from Latest from Tom's Hardware on 2026-05-01 11:30 (#75B4W) ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025, generating 32.7 billion in total revenue and ending the year with a 38.8 billion order backlog.