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It's only a matter of time before needing to go in the 3rd dimension like they've already started doing with NAND flash. In fact, during the last few years, semiconductor companies have tested out new process nodes with NAND flash before atempting them with complex structures like CPU cores. With rows and rows of identical gates lined up in a perfect grid, this makes sense as it's probably a lot easier to spot defects and implement improvements.

So, if you want a preview of what CPU process nodes will be like in a few years, simply look at what NAND flash is doing today.