TSMC prioritizing high-NA EUV scanners for R&D

from www.theregister.com - Articles on 2024-11-07 17:59 (#6S23X)

May not see full use until 2030 - even if it arrives this year

Taiwan Semiconductor Manufacturing Company is prioritizing, among its manufacturing tools, the acquisition of high numerical aperture extreme ultraviolet scanners for research and development....

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