EUV Roadmap to 280 Wafers Per Hour and Chips With 0.5 Nanometer Features
by Brian Wang from NextBigFuture.com on (#6SQ9M)
EUV roadmap updated with up to 250wph and 280 wph (wafers per hour) throughput and better overlay (alignment accuracy); probably higher ASPs as productivity improves with each version. Chips will get to 0.5 Nanometer features in 2030-2032. - EUV roadmap updated with up to 250wph and 280 wph throughput and better overlay (alignment accuracy); probably ...